Deposition of piezoelectric PZT(53/47) film by metalorganic decomposition for microelectromechanical device

Title
Deposition of piezoelectric PZT(53/47) film by metalorganic decomposition for microelectromechanical device
Authors
윤영수정형진신영화
Keywords
유기금속분해법
Issue Date
1998-06
Publisher
전기전자재료학회논문지 (Journal of KIEEME)
Citation
VOL 11, NO 6, 458-464
URI
http://pubs.kist.re.kr/handle/201004/12643
ISSN
1226-7945
Appears in Collections:
KIST Publication > Article
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