Micromachining and fabrication of thin films for MEMS-infrared detectors

Title
Micromachining and fabrication of thin films for MEMS-infrared detectors
Authors
염상섭박흥우박윤권주병권최현석오영제이종훈정문교서상희오명환
Keywords
MEMS
Issue Date
1998-09
Publisher
3rd Int'l Meeting of Pacific Rim Ceramic Societies
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/12692
Appears in Collections:
KIST Publication > Conference Paper
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