The effect of grain structure on the current-density exponent in the black equation for Al-based interconnects

Title
The effect of grain structure on the current-density exponent in the black equation for Al-based interconnects
Authors
한준현신명철S.H. Kang
Keywords
electromigration; Current Density Exponent; Black Equation
Issue Date
1998-08
Publisher
The 4th International conference on Electronic Materials, 제주 , 한국 , 8 월 24 ∼ 27 일 (1998)
Citation
, 68-68
URI
http://pubs.kist.re.kr/handle/201004/12695
Appears in Collections:
KIST Publication > Conference Paper
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