A method of determining the elastic properties of diamond-like carbon films

Title
A method of determining the elastic properties of diamond-like carbon films
Authors
조성진이광렬은광용정정현권동일
Keywords
diamond-like carbon; elastic properties; micromachining; PACVD
Issue Date
1999-01
Publisher
Diamond and related materials
Citation
VOL 8, NO 6, 1067-1072
URI
http://pubs.kist.re.kr/handle/201004/12733
ISSN
0925-9635
Appears in Collections:
KIST Publication > Article
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