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dc.contributor.author조성진-
dc.contributor.author이광렬-
dc.contributor.author은광용-
dc.contributor.author정정현-
dc.contributor.author권동일-
dc.date.accessioned2015-12-02T05:05:20Z-
dc.date.available2015-12-02T05:05:20Z-
dc.date.issued199901-
dc.identifier.citationVOL 8, NO 6, 1067-1072-
dc.identifier.issn0925-9635-
dc.identifier.other9836-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/12733-
dc.publisherDiamond and related materials-
dc.subjectdiamond-like carbon-
dc.subjectelastic properties-
dc.subjectmicromachining-
dc.subjectPACVD-
dc.titleA method of determining the elastic properties of diamond-like carbon films-
dc.typeArticle-
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