β-SiC thin film growth using microwave plasma activated CH4-SiH4 sources

Title
β-SiC thin film growth using microwave plasma activated CH4-SiH4 sources
Authors
김홍석박영준최인훈백영준
Keywords
β -SiC; microwave plasma; microvoid; low temperature growth
Issue Date
1999-01
Publisher
Thin solid films
Citation
VOL 341, 42-46
URI
http://pubs.kist.re.kr/handle/201004/12736
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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