Electrical characteristics of rf-magnetron sputtered BaTa₂ O//6 thin film

Title
Electrical characteristics of rf-magnetron sputtered BaTa₂ O//6 thin film
Authors
Y. S. Kim이윤희M.Y. Sung
Keywords
BaTa₂O//6
Issue Date
1999-01
Publisher
Solid-state electronics
Citation
VOL 43, 1189-1193
URI
http://pubs.kist.re.kr/handle/201004/12761
ISSN
0038-1101
Appears in Collections:
KIST Publication > Article
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