The effect of initial Pd catalyst oxidation state on CH4 sensitivity of SnO2 thin film sensor

Title
The effect of initial Pd catalyst oxidation state on CH4 sensitivity of SnO2 thin film sensor
Authors
최원국조정조준식송재훈정형진고석근
Keywords
Pd catalyst; partial oxidation; chemical sensitization; electronic sensitization; x-ray phototelectron spectrosocpy; CH₄ gas sensitivity
Issue Date
1999-01
Publisher
마이크로전자 및 패키징학회지; Journal of Microelectronics and Packaging Society
Citation
VOL 6, NO 2, 45-49
URI
http://pubs.kist.re.kr/handle/201004/12789
ISSN
1226-9360
Appears in Collections:
KIST Publication > Article
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