Synthesis of cubic boron nitride thin films by low-energy ion beam assisted deposition by applying substrate bias

Title
Synthesis of cubic boron nitride thin films by low-energy ion beam assisted deposition by applying substrate bias
Authors
박영준백영준
Keywords
cubic boron nitride; ion beam assisted deposition; substrate bias
Issue Date
1999-01
Publisher
METALS AND MATERIALS
Citation
VOL 5, NO 4, 381-387
URI
http://pubs.kist.re.kr/handle/201004/12803
ISSN
1225-9438
Appears in Collections:
KIST Publication > Article
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