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dc.contributor.author박영준-
dc.contributor.author백영준-
dc.date.accessioned2015-12-02T05:05:42Z-
dc.date.available2015-12-02T05:05:42Z-
dc.date.issued199901-
dc.identifier.citationVOL 5, NO 4, 381-387-
dc.identifier.issn1225-9438-
dc.identifier.other10114-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/12803-
dc.publisherMETALS AND MATERIALS-
dc.subjectcubic boron nitride-
dc.subjection beam assisted deposition-
dc.subjectsubstrate bias-
dc.titleSynthesis of cubic boron nitride thin films by low-energy ion beam assisted deposition by applying substrate bias-
dc.typeArticle-
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