Stable operation of large cathode using an oscillating source magnet current in filtered vacuum arc process.

Title
Stable operation of large cathode using an oscillating source magnet current in filtered vacuum arc process.
Authors
김종국정기형전영하이광렬
Keywords
filtered cathodic arc; diamond-like carbon; magnetic field
Issue Date
1999-01
Publisher
Proc. Applied Diamond Conference 99
Citation
, 256-261
URI
http://pubs.kist.re.kr/handle/201004/12808
Appears in Collections:
KIST Publication > Conference Paper
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