RuO2/Ru electrode on Si3N4/Si substrate for microelectromechanical systems devices based on Pb(Zr1-xTix)O3 film and surface micromachining

Title
RuO2/Ru electrode on Si3N4/Si substrate for microelectromechanical systems devices based on Pb(Zr1-xTix)O3 film and surface micromachining
Authors
윤영수김준한A. M. SchimidtD. L. PollaQ. WangW. L. Gladfelter신영화
Keywords
MEMS; micromachining; PZT; bottom electrode
Issue Date
1999-01
Publisher
Journal of materials science, Materials in electronics
Citation
VOL 9, 465-471
URI
http://pubs.kist.re.kr/handle/201004/12815
ISSN
0957-4522
Appears in Collections:
KIST Publication > Article
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