Tribological behavior of silicon-incorporated diamond-like carbon films

Title
Tribological behavior of silicon-incorporated diamond-like carbon films
Authors
김명근이광렬은광용
Keywords
mechanism; PACVD; si-DLC films; tribochemical reaction
Issue Date
1999-01
Publisher
Surface & coatings technology
Citation
VOL 112, 204-209
URI
http://pubs.kist.re.kr/handle/201004/12839
ISSN
0257-8972
Appears in Collections:
KIST Publication > Article
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