Fabrication of un-cooled infrared sensor using pyroelectric thin film

Title
Fabrication of un-cooled infrared sensor using pyroelectric thin film
Authors
박윤권주병권박흥우윤영수염상섭오영제박정호서상희오명환김철주
Keywords
thermally isolating membrane; uncooled IR-sensor; direct bonding; pyroelectirc thin film; square-shaped structure silicon substrate; sacribicial layer
Issue Date
1999-01
Publisher
Conference on Device and Process Technologies for MEMS and Microelectronics
Citation
VOL 3892 (SPIE), 356-363
URI
http://pubs.kist.re.kr/handle/201004/12871
Appears in Collections:
KIST Publication > Conference Paper
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