Synthesis and characterization of organic-inorganic hybrid materials incorporating viods via Sol-Gel reaction for interlayer dielectrics.

Title
Synthesis and characterization of organic-inorganic hybrid materials incorporating viods via Sol-Gel reaction for interlayer dielectrics.
Authors
백남석김환규황승상홍순만
Keywords
organic-inorganic hybrid
Issue Date
1999-01
Publisher
한국고분자학회 연구논문초록집
Citation
v. 24, no. 2, ?-?
URI
http://pubs.kist.re.kr/handle/201004/12907
Appears in Collections:
KIST Publication > Conference Paper
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