Fabrication of microbolometer using polyimide sacrificial layer

Title
Fabrication of microbolometer using polyimide sacrificial layer
Authors
하원호강호관김민철문성욱오명환김도훈최종술
Keywords
microbolometer; MEMS; PECVD; VOx
Issue Date
1999-11
Publisher
1999년도 대한전기학회 추계학술대회 논문집
Citation
, 1137-1139
URI
http://pubs.kist.re.kr/handle/201004/12910
Appears in Collections:
KIST Publication > Conference Paper
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