Crystallization and ferroelectric behavior of sputter deposited PZT using a target containing excess Pb and O contents

Title
Crystallization and ferroelectric behavior of sputter deposited PZT using a target containing excess Pb and O contents
Authors
하순목김도현박형호김태송
Keywords
PZT; sputter deposition; excess Pb and O; substrate heating; ferroelectric properties
Issue Date
1999-12
Publisher
Thin solid films
Citation
VOL 355-356, 525-530
URI
http://pubs.kist.re.kr/handle/201004/12952
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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