Low temperature processing of SrBi2Ta2O9 thin films by low pressure and ozone annealing treatment

Title
Low temperature processing of SrBi2Ta2O9 thin films by low pressure and ozone annealing treatment
Authors
박동균이전국정형진박종완
Keywords
low temperature processing; SrBi2Ta2O9 thin film; ozone annealing
Issue Date
1999-12
Publisher
Journal of the Korean Physical Society
Citation
VOL 35, S1188-S1191
URI
http://pubs.kist.re.kr/handle/201004/12982
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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