Improvement of field emission properties by Nb-silicide formation on Si-tip FEAs

Title
Improvement of field emission properties by Nb-silicide formation on Si-tip FEAs
Authors
박재석이상조주병권오명환장진
Keywords
FEA; FED; MEMS
Issue Date
1999-02
Publisher
제6회 반도체 학술대회
Citation
, 585-586
URI
http://pubs.kist.re.kr/handle/201004/12990
Appears in Collections:
KIST Publication > Conference Paper
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