Metal(Ti, Nb) coating and silicidization of Si-tip for field emitter applications

Title
Metal(Ti, Nb) coating and silicidization of Si-tip for field emitter applications
Authors
주병권박재석윤재형김경욱강문식백경갑장진차균현오명환
Keywords
Si-tip array; Ti and Nb coating; silicidization; field emission performance; 실리콘 팁; 티타늄 및 니오비움 코팅; 실리사이드화; 전계 방출 성능
Issue Date
1999-04
Publisher
전기전자재료학회논문지
Citation
VOL 12, NO 4, 291-297
URI
http://pubs.kist.re.kr/handle/201004/13048
ISSN
1226-7945
Appears in Collections:
KIST Publication > Article
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