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dc.contributor.author이지혜-
dc.contributor.author김강진-
dc.contributor.author이연희-
dc.date.accessioned2024-01-20T17:31:39Z-
dc.date.available2024-01-20T17:31:39Z-
dc.date.created2022-01-10-
dc.date.issued2011-03-
dc.identifier.issn1341-1756-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/130553-
dc.titleCharacterization of fluorocarbon thin films deposited by ICP and PP-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitationJournal of Surface Analysis, v.17, no.3, pp.269 - 273-
dc.citation.titleJournal of Surface Analysis-
dc.citation.volume17-
dc.citation.number3-
dc.citation.startPage269-
dc.citation.endPage273-
dc.subject.keywordAuthorplasma polymerization-
dc.subject.keywordAuthorICP-
dc.subject.keywordAuthorPP-
dc.subject.keywordAuthorfluorocarbon thin film-
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KIST Article > 2011
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