Improvement of field-emission properties by formation of Nb-silicide layer on silicon-tip FEAs

Title
Improvement of field-emission properties by formation of Nb-silicide layer on silicon-tip FEAs
Authors
J. S. ParkS. Lee주병권오명환J. JangD. Jeon
Keywords
FED; FEA; MEMS
Issue Date
1999-05
Publisher
SID 99 Digest
Citation
, 576-579
URI
http://pubs.kist.re.kr/handle/201004/13072
ISSN
0099-0966
Appears in Collections:
KIST Publication > Conference Paper
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