Effect of grain structure on the current-density exponent in the black equation for Al-alloy interconnects

Title
Effect of grain structure on the current-density exponent in the black equation for Al-alloy interconnects
Authors
한준현신명철강승혁
Keywords
black equation; grain structure; current-density exponent; interconnects
Issue Date
1999-07
Publisher
Journal of the Korean Physical Society
Citation
VOL 35, S256-S259
URI
http://pubs.kist.re.kr/handle/201004/13129
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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