Thermal conductivity of diamond-wafer deposited with multi-cathode DC-PACVD

Title
Thermal conductivity of diamond-wafer deposited with multi-cathode DC-PACVD
Authors
홍진수채희백이재갑백영준
Keywords
CVD; DC plasma; diamond film; thermal conductivity
Issue Date
1999-07
Publisher
Korea-Japan Thermophysical Properties Symposium
Citation
, 15-20
URI
http://pubs.kist.re.kr/handle/201004/13131
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE