FED 기술 및 KIST 연구결과의 소개

Title
FED 기술 및 KIST 연구결과의 소개
Authors
주병권
Keywords
FEA; FED; MEMS
Issue Date
1999-08
Publisher
한국진공학회 플라즈마분과 심포지움
Citation
, 12-12
URI
http://pubs.kist.re.kr/handle/201004/13162
Appears in Collections:
KIST Publication > Conference Paper
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