Photoluminescence induced by Si-implantation into SiO₂ layers at elevated temperature

Title
Photoluminescence induced by Si-implantation into SiO₂ layers at elevated temperature
Authors
Hyo Bae KimTae Gon KimKeun Hwa ChaeChung Nam WhangJun Yong JeongMin Suk OhSeongil Im송종한
Keywords
photoluminescence; SiO₂; implantation
Issue Date
1999-07
Publisher
Journal of the Korean Physical Society
Citation
VOL 35, S588-S590
URI
http://pubs.kist.re.kr/handle/201004/13164
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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