Ferromagnetic resonance of dry etched permalloy thin films

Title
Ferromagnetic resonance of dry etched permalloy thin films
Authors
김성동J. J. LeeK. H. Kim임상호김희중
Keywords
ion beam etching; reactive ion etching; ferromagnetic resonance; permalloy; etching damage
Issue Date
1999-09
Publisher
IEEE transactions on magnetics
Citation
VOL 35, NO 5, 3397-3399
URI
http://pubs.kist.re.kr/handle/201004/13201
ISSN
0018-9464
Appears in Collections:
KIST Publication > Article
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