Microstructure and electrical properties of indium oxide thin films prepared by direct oxygen ion-assisted deposition

Title
Microstructure and electrical properties of indium oxide thin films prepared by direct oxygen ion-assisted deposition
Authors
조준식고석근윤기현
Keywords
indium tin oxide
Issue Date
2000-01
Publisher
Journal of the Electrochemical Society
Citation
VOL 147, NO 3, 1065-1070
URI
http://pubs.kist.re.kr/handle/201004/13223
ISSN
0013-4651
Appears in Collections:
KIST Publication > Article
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