Free-standing diamond wafers deposited by multi-cathode direct current plasma assisted chemical vapor deposition

Title
Free-standing diamond wafers deposited by multi-cathode direct current plasma assisted chemical vapor deposition
Authors
이재갑은광용채희백백영준
Keywords
CVD diamond; free-standing film; thermal conductivity; stress control
Issue Date
2000-01
Publisher
Diamond and related materials
Citation
VOL 9, 364-367
URI
http://pubs.kist.re.kr/handle/201004/13231
ISSN
0925-9635
Appears in Collections:
KIST Publication > Article
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