Surface and interface microstructural properties of Ru thin films grown on InSb (111) substrates at room temperature

Title
Surface and interface microstructural properties of Ru thin films grown on InSb (111) substrates at room temperature
Authors
T. W. KimD. U. LeeJ. H. Lee윤영수J. Y. LeeH. L. Park
Keywords
Ru; InSb; surface; interface; microstructure
Issue Date
2000-01
Publisher
Applied surface science
Citation
VOL 161, 452-458
URI
http://pubs.kist.re.kr/handle/201004/13245
ISSN
0169-4332
Appears in Collections:
KIST Publication > Article
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