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반도체 제조 공정용 SiC 소재 기술

Authors

조경선; 윤성호; 정훈; 채수호; 임광영; 김영욱; 박상환

Issue Date

2009-02

Citation

세라미스트, v.12, no.1, pp.33 - 48

ISSN

1226-976X

URI

https://pubs.kist.re.kr/handle/201004/132755

Appears in Collections:

KIST Article > 2009

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