Study on glass-to-silicon anodic bonding using hydrophilic process

Title
Study on glass-to-silicon anodic bonding using hydrophilic process
Authors
주병권이덕중장진오명환
Keywords
wafer bonding
Issue Date
2000-01
Publisher
제 7 회 반도체 학술대회
Citation
, 645-646
URI
http://pubs.kist.re.kr/handle/201004/13280
Appears in Collections:
KIST Publication > Conference Paper
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