Investigation of the performance characteristics of an in-situ particle monitor at low pressures using aerodynamic lenses

Title
Investigation of the performance characteristics of an in-situ particle monitor at low pressures using aerodynamic lenses
Authors
배귀남
Keywords
in-situ particle monitor; particle beam; aerodynamic lens; low pressure; detection efficiency; 실시간 입자측정기; 입자 빔; 공기역학적 렌즈; 저압; 측정효율
Issue Date
2000-10
Publisher
대한기계학회논문집B; Transactions of the Korean Society of Mechanical Engineers B
Citation
VOL 24, NO 10, 1359-1367
URI
http://pubs.kist.re.kr/handle/201004/13292
ISSN
1226-4881
Appears in Collections:
KIST Publication > Article
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