The effect of heat treatments on the electron emission of amorphous carbon film deposited by RF magnetron sputtering method

Title
The effect of heat treatments on the electron emission of amorphous carbon film deposited by RF magnetron sputtering method
Authors
주병권장윤택이윤희안진호오명환
Keywords
field emission
Issue Date
2000-01
Publisher
제 7 회 반도체 학술대회
Citation
, 663-664
URI
http://pubs.kist.re.kr/handle/201004/13306
Appears in Collections:
KIST Publication > Conference Paper
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