Elastic modulus of very thin diamond-like carbon films

Title
Elastic modulus of very thin diamond-like carbon films
Authors
정진원이철승고대홍한준희은광용이광렬
Keywords
다이아몬드상 카본필름; 박막 탄성계수; free-overhang method
Issue Date
2000-11
Publisher
제 14 회 재료강도 심포지움 논문집
Citation
, 287-299
URI
http://pubs.kist.re.kr/handle/201004/13330
Appears in Collections:
KIST Publication > Conference Paper
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