The fabrication of the suspended thin film resonator(STFR) using AlN piezoelectric

Title
The fabrication of the suspended thin film resonator(STFR) using AlN piezoelectric
Authors
김현호이시형이전국오명환김수원주병권
Keywords
aluminum nitride (AlN)
Issue Date
2000-11
Publisher
센서학회 종합학술대회; Sensors Conference 2000
Citation
, 13-16
URI
http://pubs.kist.re.kr/handle/201004/13362
Appears in Collections:
KIST Publication > Conference Paper
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