박막제작을 위한 이온빔 스퍼터링

Title
박막제작을 위한 이온빔 스퍼터링
Authors
윤영수
Keywords
lon beam
Issue Date
2000-02
Publisher
세라미스트
Citation
VOL 3, NO 1, 11-15
URI
http://pubs.kist.re.kr/handle/201004/13408
Appears in Collections:
KIST Publication > ETC
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