Fabrication and electrochemical characterization of amorphous vanadium oxide thin films for thin film micro-battery by reactive r.f. sputtering

Title
Fabrication and electrochemical characterization of amorphous vanadium oxide thin films for thin film micro-battery by reactive r.f. sputtering
Authors
전은정신영화남상철윤영수조원일
Keywords
amorphous vanadium oxide
Issue Date
2000-02
Publisher
한국진공학회지; Journal of the Korean Vacuum Society
Citation
VOL 9, NO 1, 42-47
URI
http://pubs.kist.re.kr/handle/201004/13409
ISSN
1225-8822
Appears in Collections:
KIST Publication > Article
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