keV and MeV ion beam modification of polyimide films

Title
keV and MeV ion beam modification of polyimide films
Authors
이연희한승희송종한임현의서무진
Keywords
polymer modification; plasma source ion implantation; surface resistivity
Issue Date
2000-02
Publisher
제18회 한국진공학회 학술발표회
Citation
, 170-170
URI
http://pubs.kist.re.kr/handle/201004/13412
Appears in Collections:
KIST Publication > Conference Paper
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