DSpace at KISTKIST Article2007

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dc.contributor.author강길범-
dc.contributor.author김성일-
dc.contributor.author김영환-
dc.contributor.author박민철-
dc.contributor.author김용태-
dc.contributor.author이창우-
dc.date.accessioned2024-01-21T01:01:19Z-
dc.date.available2024-01-21T01:01:19Z-
dc.date.created2022-01-10-
dc.date.issued2007-06-
dc.identifier.issn1226-9360-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/134336-
dc.languageKorean-
dc.publisher한국마이크로전자및패키징학회-
dc.title블록 공중합체 박막을 이용한 실리콘 나노점의 형성-
dc.title.alternativeFabrication of Si Nano Dots by Using Diblock Copolymer Thin Film-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation마이크로전자 및 패키징학회지, v.14, no.2, pp.17 - 22-
dc.citation.title마이크로전자 및 패키징학회지-
dc.citation.volume14-
dc.citation.number2-
dc.citation.startPage17-
dc.citation.endPage22-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClasskci-
dc.identifier.kciidART001213697-
dc.subject.keywordAuthordiblock copolymer-
dc.subject.keywordAuthorcopolymer lithography-
dc.subject.keywordAuthorreactive ion etching-
dc.subject.keywordAuthorSi nano dots-
dc.subject.keywordAuthornanotemplate-
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KIST Article > 2007
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