KIST Library Institutional Repository

입방정 질화붕소 박막의 잔류응력 형성에 미치는 산소 첨가 효과

Other Titles

Effect of Oxygen Addition on Residual Stress Formation of Cubic Boron Nitride Thin Films

Authors

장희연; 박종극; 이욱성; 백영준; 임대순; 정증현

Issue Date

2007-04

Publisher

한국표면공학회

Citation

한국표면공학회지, v.40, no.2, pp.32 - 97

Keywords

residual stress; nucleation; Cubic boron nitride; oxygen addition

ISSN

1225-8024

URI

https://pubs.kist.re.kr/handle/201004/134474

Appears in Collections:

KIST Article > 2007

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML