Cavity를 갖는 SDB SOI 구조의 제작

Title
Cavity를 갖는 SDB SOI 구조의 제작
Authors
주병권강경두정수태정재훈정귀상
Keywords
wafer bonding
Issue Date
2000-07
Publisher
전기전자재료학회 하계학술대회
Citation
, 557-560
URI
http://pubs.kist.re.kr/handle/201004/13574
Appears in Collections:
KIST Publication > Conference Paper
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