Surface-micromachined vacuum magnetic field sensors

Title
Surface-micromachined vacuum magnetic field sensors
Authors
주병권박흥우이덕중박정호오명환
Keywords
MEMS
Issue Date
2000-08
Publisher
IVMC'2000
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/13586
Appears in Collections:
KIST Publication > Conference Paper
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