Thermal stability of tungsten-boron-nitride thin film as diffusion barrier

Title
Thermal stability of tungsten-boron-nitride thin film as diffusion barrier
Authors
박영균김성일김용태이창우
Keywords
thermal stability; W-B-N; thin film; diffusion barrier
Issue Date
2000-09
Publisher
Journal of the Korean Physical Society
Citation
VOL 37, NO 3, 324-327
URI
http://pubs.kist.re.kr/handle/201004/13621
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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