Impurity free vacancy disordering of an InGaAsP quantum-well structure by using SiN//x film prepared by plasma enhanced chemical vapor deposition

Title
Impurity free vacancy disordering of an InGaAsP quantum-well structure by using SiN//x film prepared by plasma enhanced chemical vapor deposition
Authors
최원준이희택우덕하김선호
Keywords
quantum well intermixing
Issue Date
2000-09
Publisher
Proceedings of ICSMM2000
Citation
, 63-63
URI
http://pubs.kist.re.kr/handle/201004/13631
Appears in Collections:
KIST Publication > Conference Paper
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