Biaxial elastic modulus of very thin diamond-like carbon (DLC) films
- Biaxial elastic modulus of very thin diamond-like carbon (DLC) films
- 정진원; 이철승; 고대홍; 한준희; 은광용; 이광렬
- elastic modulus; Diamond-like carbon; Thickness dependence; Free overhang method
- Issue Date
- Diamond and related materials
- VOL 10, NO 11, 2069-2074
- The biaxial elastic modulus of very thin diamond-like carbon ŽDLC. films was measured by the recently suggested free
overhang method. The DLC films of thickness ranging from 33 to 1100 nm were deposited on Si wafers by radio frequency
plasma-assisted chemical vapor deposition Žr.f.-PACVD. or by the filtered vacuum arc ŽFVA. process. Because the substrate was
partially removed to obtain sinusoidal free overhang of the DLC film, this method has an advantage over other methods in that
the measured value is not affected by the mechanical properties of the substrate. This advantage is more significant for a very
thin film deposited on a substrate with a large difference in mechanical properties. The measured biaxial elastic moduli were
reasonable values as can be judged from the plane strain modulus of thick films measured by nanoindentation. The biaxial elastic
modulus of the film deposited by r.f.-PACVD was 90 3 GPa and that of the film deposited by FVA process was 600 50 GPa.
While the biaxial elastic modulus of the film deposited by FVA is independent of the film thickness, the film deposited by
r.f.-PACVD exhibited decreased elastic modulus with decreasing film thickness when the film is thinner than 500 nm. Although
the reason for the different behavior could not be clarified at the present state, differences in structural evolution during the
initial stage of film growth seem to be the reason. 2001 Elsevier Science B.V. All rights reserved.
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