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Humidity Dependence of the Residual Stress of Diamond-like Carbon Film

Other Titles

습도에 따른 다이아몬드성 카본 필름의 잔류응력 변화에 대한 연구

Authors

이영진; 김태영; 이광렬; 양인상

Issue Date

2004-12

Publisher

한국진공학회

Citation

한국진공학회지 (Journal of the Korean Vacuum Society), v.13, no.4, pp.168 - 174

Keywords

DLC; stress; humidity; 압축 잔류 응력; 다이아몬드성 카본 필름; 습도의존성; in-situ stress measurement

URI

https://pubs.kist.re.kr/handle/201004/136947

Appears in Collections:

KIST Article > 2004

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