Implantation of N-ion on sapphire substrate for GaN epilayer

Title
Implantation of N-ion on sapphire substrate for GaN epilayer
Authors
박용주Yong Suk ChoEui Kwan Koh김은규Gyeungho KimDongjin ByunSuk-Ki Min
Issue Date
2001-11
Publisher
Digest papers on Microprocesses and Nanotechnology 2001
Citation
, 222-223
URI
http://pubs.kist.re.kr/handle/201004/13744
Appears in Collections:
KIST Publication > Conference Paper
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