Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer

Title
Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer
Authors
박종연Kun-tae Kim문성욱박정호오명환박종오
Keywords
MRPBI; 3D UV-lithography; IR image sensor; 3D MEMS antenna; microbolometer; HARS
Issue Date
2001-12
Publisher
Proceedings of MICRO/MEMS
Citation
VOL 4592, 377-387
URI
http://pubs.kist.re.kr/handle/201004/13761
Appears in Collections:
KIST Publication > Conference Paper
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