3D MEMS antenna fabrication for enhanced uncooled infrared detector

Title
3D MEMS antenna fabrication for enhanced uncooled infrared detector
Authors
박종연문성욱박정호
Keywords
MRPBI
Issue Date
2001-12
Publisher
적외선 영상센서 conference 확대 초록집
Citation
, 26-30
URI
http://pubs.kist.re.kr/handle/201004/13772
Appears in Collections:
KIST Publication > Conference Paper
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